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Applied Physics
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Clean Room Foggers to visualize airflow, turbulence and air flow patterns
Cascade Impactors and Nano-MOUDI Impactor to sample aerosol particles
PSL Wafer Standards, PSL Spheres for KLA-Tencor and Hitachi calibration
Process Particles such as Si, SiP2, A12O3, TiO2, Si3N4, Ti, W, Cu, Ta
Water Condensation Particle Counters to replace Laser Particle Counters
PartSens Surface Particle Counter to provide Quality and Manufacturing feedback

Foggers, PSL Spheres