Filter Tests using automated AutoScan ULPA/HEPA Filter Test System

Applied Physics, Inc.


Applied Physics, Inc.

Call Us: 1-720-635-3931

Wafer Standards

Clean Room Foggers

Nitrogen Foggers

PSL Spheres, Silica Particles

MSP Corp.

Aerosol Products

AutoScan™ ULPA/HEPA Filter

Leak Detection and Efficiency Measuring, Filter Test System - Request a Quote

Filter Test System, AutoScanModel 3100: This high performance, x-y scanning, filter leak detection such as pin hole leaks and efficiency measuring system is for production testing of ULPA/HEPA filters. PSL spheres are used as the aerosol challenge, and one or more laser particle counters are used downstream to detect leaks and measure filter efficiency. The system is capable of detecting pin hole leaks to 3 x 10-6 cfm and certifying ULPA filters to the 99.9999% efficiency level. Automatic operation through recipe control and data acquisition make this filter test system ideal for testing high efficiency filters in the production environment. Each machine is custom-designed to meet the needs of the individual customer. The system includes an x-y scanner (shown at left), a control module, and associated blower, aerosol generator, diluter, etc. (not shown).


  • Leak detection and efficiency certification of ULPA/HEPA filters
  • Efficiency certification to the 99.9999% level
  • 1 x 10 8ft3 PSL-sphere challenge in 720 cfm of test flow
  • Low PSL consumption through efficient atomizer design and computer-control of atomizer operation
ULPA and HEPA filter test systemleak detection and efficiency, filter test system
ULPA HEPA filter test systemULPA HEPA filter test


The Model M3100 is custom-designed to meet the individual needs of the customer. The following performance specifications are typical. The actual specifications are determined for each application

(subject to change without notice)

PSL sphere size range 0.1 - 0.5 µm
PSL output rate 7.2 x 1010 per min @ 0.10 µm
Maximum filter size 3' x 6'
Maximum flow rate 1000 cfm (optional 2000cfm)
Compressed air or N2 required 8 scfm @ 80 - 100 psig
Size, weight and power consumption Depends on specific configuration