UltraPure Fogger, Clean room fogger, nitrogen fog generator, smoke generator, liquid nitrogen fogger, visualize airflow, airflow turbulence

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Clean Room, UltraPure, Nitrogen Fog Generator

The UltraPure LN2 fogger is a nitrogen fog generator, a portable fogger using DIH2O and liquid nitrogen to create an ultrapure fog for 35-40 minutes at 15cfm to visualize airflow and turbulence in Semiconductor Clean Rooms and Pharmaceutical suites.

Nitrogen Fog Generator, UltraPure, Clean Room Fogger, 15cfm - Request a Quote

UltraPure fogger - a nitrogen fog generator is used in a clean room to provide visualization of airflow, flow patterns, dead spaces and turbulence. Nitrogen fog generators support USP 797 In-Situ Airflow Analysis in the Pharmaceutical industry

The Nitrogen Fogger uses two sources to produce an ultra pure fog. The process combining the liquid nitrogen and DI water includes boiling the liquid nitrogen and DI water. As the LN2 and DI water boils, the vapor droplets are combined to form the highest purity of fog and highest fog density, which is not matched by any other type of fogger. UltraPure fog provides the greatest visible distance of the airflow turbulence, patterns. The ultrapure fog can easily describe how airflow is balanced in a sterile room or ISO suite. The nitrogen fog generator is sometimes referred to as a smoke machine by facility staff. In fact it does not produce smoke at all, which would be a particulate type of fog. The manner in which the nitrogen fogger produces fog causes DI Water and liquid nitrogen to boil in separate SS dewars. The DI water comes to a boil forming a steam, a water vapor composed of droplets less than 2 microns in diameter. Although DI water is quite clean, there is some remaining residue in the DI water. During the DI Water boil process, any remaining residue in the DI water gets attracted to the SS walls of the DI Water chamber, which is grounded. This helps to provide an ultra pure fog using a typical 16 Meg Ohm Distilled water or WFI water for injection. The water vapor droplets then pass over the Liquid nitrogen dewar, where the liquid nitrogen is boiling at room temperature. The resulting combination of water droplet and nitrogen droplet forms an ultrapure fog droplet at a nominal 3 micron diameter; which creates a very dense, low pressure, ultrapure fog. The high density of ultrapure fog droplets provides the best visualization of the airflow and turbulence, increases the distance at which one can see the airflow and it is the most pure form of fog that can be used in a cleanroom.

An ultrapure, nitrogen fog generator creates a particle free, non-contaminating fog, leaving no residue behind as the ultra pure fog evaporates back to the air components that we breathe, nitrogen, oxygen and hydrogen. The fog enters the airflow at very low pressure, thus it does not create a turbulence, making the UltraPure nitrogen fogger the best cleanroom fogger suitable for use in Class 1 - 100,000 clean rooms for airflow, turbulence visualization, flow balancing and contaminant transport studies around process tools. This ultra pure fog is typically used to support USP 797 In-Situ Airflow Analysis in Pharmaceutical sterile rooms, barrier isolators and ISO 1-9 suites.

Model 2001 Portable Fogger Features - Request a Quote

Model 2001 cleanroom fogger
  • Model 2001 Portable Fogger
  • High fog density with 15 cfm of fog volume for 40 minutes
  • Truly non-contaminating, ultrapure fog
  • No measurable contaminating residue upon evaporation of water droplets
  • Compact, easily transportable package with stream or fog rake output
  • M2001, Ultra pure, Clean room Fogger - A compact, ultra pure LN2 fogger with very high fog density producing 15cfm+ fog volume for 35-40 minutes operation. Designed for Class 1, 10, 100, 1000, 10000, 100,000 Clean Rooms and ISO 1 to ISO 9 Pharmaceutical suites.
  • Ultrapure fogger visualization of airflow and turbulence in clean rooms
  • Exhaust and ventilation studies around wafer handling systems
  • Air balance studies in Pharmaceutical suites and clean rooms

Model 2001 UltraPure Technical Benefits - Request a Quote

ln2 fogger
  • Volume of smoke generator fog is desired as high as possible to visualize as much airflow turbulence as possible. Contaminants should be minimized to near zero so as not to affect the process and not require wipe downs after fogging
  • Temperature output is desired as close to or slightly above room temperature as possible to ensure cold fog does not create its own turbulence. Droplet size is desired as small as possible and as uniformly sized as possible
  • Fog density is desired as high as possible to increase visibility of airflow
  • Fog duration is desired as long as possible to increase time on site testing
  • Fog distance is desired as far as possible to extend visualization effects of fog in the airflow
  • Fog output pressure is desired as low as possible so that pressurized fog does not create its own turbulence
  • White Powder Coat paint over the SS metal enclosure prevents metal contamination to the fog and prevents visible fingerprint on the SS
  • The Fog Tube is flexible and made of material that does not add particulate contamination to the fog

* Fog distance measured at typical 40% humidity and air velocity of 90fpm. Visual fog distance decreases as humidity decreases or as airflow velocity increases.

Model 2001

Model 2001 Clean Room Fogger Specifications- Request a Quote
(Subject to change without notice)

  Model 2001 Cleanroom Fogger
FOG Duration 40 minutes
FOG Volume About 15cfm
FOG Type UltraPure Fog
Class Room Class 1 or higher
Boiler capacity 3 liters (2.8 Qts)
Dewar capacity 9 liters (8.5 Qts)

LN2 Weight
6.4 kg (14 lb.) LN2

115 VAC, 60 Hz, 14A

Optional 230 VAC, 50 Hz, 8A
Dimensions 609 x 432 x 1142 cm
(L x W x H)
Dry Weight
21" x 15" x 16"
18.6 kg (41 lb.)

Full Weight 25 kg (55 lb.)

Which Clean Room Fogger or Smoke Generator Is Best For My Applications?

Model 2001, UltraPure Fogger, 15cfm
  • When fog purity and long, visible airflow visualization are needed
  • When fogging larger clean rooms, ceiling to floor areas
  • When fog exit velocity must not create turbulence
  • When fog visibility of 10-15 feet distance is required
  • When fogging Class 1 to Class 10,000 semiconductor and pharmaceutical clean rooms

* Use Hand Gloves and Face Shield when filling LN2
Use 16M ohm DI water or WFI Pharmaceutical Water
Clean Room Fogger, 8-9cfm
  • When purchasing budget is lower, basic Fogger OK
  • 60 minutes of fog duration is useful with quick turnaround
  • Fog visibility for 6-8 feet distance is acceptable
  • Fogging Class 10 and higher cleanrooms and fume hoods
  • Fogging airflow in semiconductor or pharmaceutical clean rooms

CO2 Fogger, Vapor DiH2O Fogger, 3cfm
  • When Fogging Hazardous areas, No Electrical Permitted
  • Fog visibility of 3-4 feet distance is acceptable
  • 6-8 minutes of fog duration is useful
  • Fogging small areas
  • Class 10 or above in semiconductor or pharmaceutical clean rooms
  • Fogging areas that have no power outletss

Portable Fogger, DiH2O Fogger, 3cfm
  • When fogger PORTABILITY is a must
  • Fog visible distance of 3-4 feet distance is acceptable
  • When 25 minutes of fog duration is useful with quick turnaround
  • When fogging ≥ Class 10 and above in semiconductor and pharmaceutical cleanrooms
  • When fogging "hard to get at" areas
16 Meg ohm DI water is standard, but 64 Meg ohm can be used as well
Do not permit DI Water to go stagnant in the chamber
** Use gloves when handling CO2 ice

Fogger Technology

The three types of foggers manufactured for use in the semiconductor and pharmaceutical industry are described below.

Ultra Pure Nitrogen Fog Generator: This type of fogger provides the highest volume, density and purity of fog. Purity is created by bringing the water to a boil, creating a vapor, while simultaneously using gravity to remove the residual mass from the vapor. This process removes any bacterial agents and residual particulate matter from the vapor. The pure vapor is then passed over an LN2 bath, which naturally boils at room temperature. The water molecules quickly attach to the nitrogen molecules (quenching process), creating a nominal 3um fog droplet. The volume of water and nitrogen molecules that combine is extremely high in quantity, creating a dense, high volume, ultrapure fog output with exit temperatures of about 80 degrees F with an exit pressure of = 0.5 lbs, so as not to disturb the surrounding airflow. The fog is ultrapure leaving minimal, if any, trace particles behind. It evaporates to its gaseous hydrogen, oxygen and nitrogen components, which are natural to the Cleanroom environment. The high density of the fog increases the duration and travel distance of the fog. This fogger can be used in any class Cleanroom environment.

DI Water Fogger: This type of fogger has less fog density (less capability to visualize airflow) than the UltraPure Fogger described above, but more density than the CO2 fogger described below. The DI water fog is generated by atomizing DI water into water droplets, which are nominally 3-10um in size. The water droplets may contain residual particulate matter remaining in the DI water, but this would be very trace amounts. If the facility manager operates a class 10 to Class 10000 Clean room, the use of a DI Water Fogger poses no problem. However, Cleanroom Engineers who manage facilities operating at Class 1 to Class 10 performance may desire to use an ultrapure fogger. Although some DI Water foggers are described as ultrapure, unless the DI water is vaporized to remove bacterial agents and residual particulate matter, the fog is not ultrapure. The 3-5lb output pressure of a DI water fogger also distorts the airflow patterns, thus adding to the turbulence. The temperature output is typically less than the surrounding room temperature, thus a fog generated from the atomized water droplets will sink momentarily in a typical 70 degree room temperature.

CO2 Fogger: This type of fogger is designed for low volume, non-process critical applications such as bench airflow testing. The fog is created using CO2 ice as the fogging agent. The fog contains elements of the CO2 and the user must determine if the residual CO2 components are acceptable in a process environment operating Class 1 to Class 1,000. The 2-3lb output pressure of a CO2 fogger also distorts the airflow patterns, thus adding to the turbulence.