UltraPure Fogger, nitrogen fog generator, smoke generator, liquid nitrogen fogger, visualize airflow, airflow turbulence

Applied Physics, Inc.


Applied Physics, Inc.

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Clean Room UltraPure, Nitrogen Fog Generator

The UltraPure LN2 fogger is a nitrogen fog generator using deionized water or WFI water and liquid nitrogen to create an ultrapure fog at a volume of 5 cubic meters of ultrapure fog per minute for 90 minutes to visualize airflow and turbulence in Semiconductor Clean Rooms, Sterile Rooms and ISO suites The fog volume is high enough to conduct 3D Modeling of airflow visualization.

Nitrogen Fog Generator, UltraPure, Clean Room Fogger, 5 cubic meters per minute - Request a Quote

UltraPure fogger - The Apollo 32 is a nitrogen fog generator for user clean rooms, sterile rooms and ISO suites to provide visualization of airflow, flow patterns, dead spaces and turbulence. Nitrogen fog generators support Pharmaceutical guidelines, USP 797 In-Situ Airflow Analysis, ISO 14644-3 Annex B7 guidelines and semiconductor clean room guidelines

A Nitrogen Fogger uses two sources to produce an ultra pure fog. The process combining the liquid nitrogen and DI water includes boiling the liquid nitrogen and DI water. As the LN2 and DI water boils, the vapor droplets are combined to form the highest purity of fog and highest fog density, which is not matched by any other type of fogger. UltraPure fog provides the greatest visible distance of the airflow turbulence, patterns. The ultrapure fog can easily describe how airflow is balanced in a sterile room or ISO suite. The nitrogen fog generator is sometimes referred to as a smoke machine by facility staff. In fact it does not produce smoke at all, which would be a particulate type of fog. The manner in which the nitrogen fogger produces fog causes DI Water and liquid nitrogen to boil in separate SS dewars. The DI water comes to a boil forming a steam, a water vapor composed of droplets less than 2 microns in diameter. Although DI water is quite clean, there is some remaining residue in the DI water. During the DI Water boil process, any remaining residue in the DI water gets attracted to the SS walls of the DI Water chamber, which is grounded. This helps to provide an ultra pure fog using a typical 16 Meg Ohm Distilled water or WFI water for injection. The water vapor droplets then pass over the Liquid nitrogen dewar, where the liquid nitrogen is boiling at room temperature. The resulting combination of water droplet and nitrogen droplet forms an ultrapure fog droplet at a nominal 3 micron diameter; which creates a very dense, low pressure, ultrapure fog. The high density of ultrapure fog droplets provides the best visualization of the airflow and turbulence, increases the distance at which one can see the airflow and it is the most pure form of fog that can be used in a cleanroom.

An ultrapure, nitrogen fog generator creates a particle free, non-contaminating fog, leaving no residue behind as the ultra pure fog evaporates back to the air components that we breathe, nitrogen, oxygen and hydrogen. The fog enters the airflow at very low pressure, thus it does not create a turbulence, making the UltraPure nitrogen fogger the best cleanroom fogger suitable for use in Class 1 - 100,000 clean rooms for airflow, turbulence visualization, flow balancing and contaminant transport studies around process tools. This ultra pure fog is typically used to support USP 797 In-Situ Airflow Analysis in Pharmaceutical sterile rooms, barrier isolators and ISO 1-9 suites.

Review the UltraPure Cleanroom Fogger
Apollo32 nitrogen fog generator
Ultrapure Fog Generator, 5 cubic meters / minute for 90 minutes, 20-30 feet visible airflow

Performance of the Apollo 32 Ultrapure Fogger- Request a Quote

  Apollo 32, AP32 Ultrapure Fogger
FOG Duration up to 90 minutes
FOG Volume 5 cubic meters per minute
Total FOG Volume 450 cubic meters of ultrapure fog over 90 minute operation cycle
Visible Fog Distances 20-30 feet
FOG Type Ultrapure Fog using LN2 and DI Water, or LN2 and WFI Water
Class of Clean Room Class 1 to 10,000
Compatible Guidelines USP 797 In-Situ Airflow Analysis, ISO 14644-3 Annex B7, Semiconductor Cleanroom
Type of Room Clean Room, Sterile Room, ISO Suite, Medical Room
Water Boiler capacity 5.0 liters
LN2 (LNG) Dewar capacity 32 Liters

Liquid Weight 17.77 kg (39 lb.) LN2 and 4.8 Kg (10.6 lbs) Water
Power Requirements 220 VAC, 50/60 Hz, 10A, 3 Wire
Optional Power 220 VAC, 50/50 Hz, 10A, 4 wire; 100VAC, 50Hz is also available
Metric Dimensions, (H x W x D) 1095mm x 540mm x 766mm
US Dimensions, (H x W x D) 42.7 inches x 21.06 inches x 29.9 inches
Full Weight 77 kg (170 lb.)

Ultrapure Fogger Features - Request a Quote

Apollo Fog Curtain
Ultrapure Fog Generator with Fog Curtain
  • Continuous airflow visualization to describe direction, velocity and patterns in airflow
  • Containment transport airflow studies
  • Visualization of unwanted gas emission locations and dead zones
  • Tracking routes of unwanted air flow infiltration into clean rooms
  • No contamination created, no contamination left behind
  • No cleanup of any kind after fog visualization
  • Superb 3D airflow modeling capabilities
  • Very low fog exit pressure, as as not to create turbulence as fog enters airflow
  • Compact, transportable, shipping case
  • Fog stream output and fog rake output
  • For use in sterile rooms, ISO suites and clean rooms
  • High density fog visualization of airflow and turbulence
  • Exhaust and ventilation studies around wafer handling systems
  • Air balance studies in Pharmaceutical suites and clean rooms

Ultrapure Fogger Advantages - Request a Quote

Very dense, Stream Fog
Very dense, Stream Fog
  • Most dense fog by converting 417 ml of liquid per minute to an ultrapure fog
  • Greatest visible airflow distances of 20-30 feet
  • Excellent volume of ultrapure fog at 5 cubic meters per minute
  • Total volume of 450 cubic meters of ultrapure fog per operating cycle
  • Longest operating time of 90 minutes
  • No contamination is created, no cleanup is required, no contamination to the process
  • No turbulence created as fog enters the airflow
  • Roller castors for easy movement over floor
  • Large, 80mm, 3.15", fog outlet
  • User Friendly display and touch pads
  • Stainless steel contacts the LNG and DI Water for best purity of fog
  • very low fog exit pressure that does not create a disturbance to airflow
  • No metal contamination to fog using Stainless Steel water heater and LNG Dewar
  • Easy DI Water and LN2 (LNG) fill up

* Fog distance measured at 40% humidity and air velocity of 90fpm. Visual fog distance decreases as humidity decreases or as airflow velocity increases.

20-30 feet visible fog distance
20-30 feet visible fog distance

Which Clean Room Fogger or Smoke Generator Is Best For My Applications?

AP32, Apollo 32 UltraPure Fogger, 5 cubic Meters per minute
  • When fog purity and long, visible airflow visualization are needed
  • When fogging large volume clean rooms, ceiling to floor areas
  • When fog exit velocity must not create turbulence
  • When fog visibility of 20-30 feet distance is required
  • When fogging Class 1 to Class 10,000 semiconductor and pharmaceutical clean rooms

* Use Hand Gloves and Face Shield when filling LN2
Use 16M ohm DI water or WFI Pharmaceutical Water
Clean Room Fogger, 8-9cfm
  • When purchasing budget is lower, basic Fogger OK
  • 60 minutes of fog duration is useful with quick turnaround
  • Fog visibility for 6-8 feet distance is acceptable
  • Fogging Class 10 and higher cleanrooms and fume hoods
  • Fogging airflow in semiconductor or pharmaceutical clean rooms

CO2 Fogger, Vapor DiH2O Fogger, 3cfm
  • When Fogging Hazardous areas, No Electrical Permitted
  • Fog visibility of 3-4 feet distance is acceptable
  • 6-8 minutes of fog duration is useful
  • Fogging small areas
  • Class 10 or above in semiconductor or pharmaceutical clean rooms
  • Fogging areas that have no power outletss

Portable Fogger, DiH2O Fogger, 3cfm
  • When fogger PORTABILITY is a must
  • Fog visible distance of 3-4 feet distance is acceptable
  • When 25 minutes of fog duration is useful with quick turnaround
  • When fogging ≥ Class 10 and above in semiconductor and pharmaceutical cleanrooms
  • When fogging "hard to get at" areas
16 Meg ohm DI water is standard, but 64 Meg ohm can be used as well
Do not permit DI Water to go stagnant in the chamber
** Use gloves when handling CO2 ice

Fogger Technology

The three types of foggers manufactured for use in the semiconductor and pharmaceutical industry are described below.

Ultrapure Nitrogen Fog Generator using LNG and DI Water or WFI Water: This type of fogger provides the highest fog volume, highest fog density and highest fog purity of all foggers produced. Fog purity is created by bringing the water to a boil to create a water vapor, while simultaneously using gravity to remove the residual mass from the vapor. This process removes any bacterial agents and residual particulate matter from the vapor. The pure vapor is then passed over an LN2 bath, which naturally boils at room temperature. The water molecules quickly attach to the nitrogen molecules (quenching process), creating a nominal 3um fog droplet. The volume of water and nitrogen molecules that combine is extremely high in quantity, creating a dense, high volume, ultrapure fog output with exit temperatures of about 80 degrees F with an exit pressure of = 0.5 lbs, so as not to disturb the surrounding airflow. The fog is ultrapure leaving minimal, if any, trace particles behind. It evaporates to its gaseous hydrogen, oxygen and nitrogen components, which are natural to the Cleanroom environment. The high density of the fog increases the duration and travel distance of the fog. This fogger can be used in any class Cleanroom environment.

DI Water Fogger: This type of fogger has less fog density (less capability to visualize airflow) than the UltraPure Fogger described above, but more density than the CO2 fogger described below. The DI water fog is generated by atomizing DI water into water droplets, which are nominally 3-10um in size. The water droplets may contain residual particulate matter remaining in the DI water, but this would be very trace amounts. If the facility manager operates a class 10 to Class 10000 Clean room, the use of a DI Water Fogger poses no problem. However, Cleanroom Engineers who manage facilities operating at Class 1 to Class 10 performance may desire to use an ultrapure fogger. Although some DI Water foggers are described as ultrapure, unless the DI water is vaporized to remove bacterial agents and residual particulate matter, the fog is not ultrapure. The 3-5lb output pressure of a DI water fogger also distorts the airflow patterns, thus adding to the turbulence. The temperature output is typically less than the surrounding room temperature, thus a fog generated from the atomized water droplets will sink momentarily in a typical 70 degree room temperature.

CO2 Fogger: This type of fogger is designed for low volume, non-process critical applications such as bench airflow testing. The fog is created using CO2 ice as the fogging agent. The fog contains elements of the CO2 and the user must determine if the residual CO2 components are acceptable in a process environment operating Class 1 to Class 1,000. The 2-3lb output pressure of a CO2 fogger also distorts the airflow patterns, thus adding to the turbulence.