Applied Physics, Inc. 720-635-3931
PO Box 186 Monte Vista CO 81144
400 N Country Road 2E Monte Vista CO 81144
cleanroom fogger, LN2 fogger, smoke studies, ultrapure fogger, stage fog, calibration wafer standards, silica nano-particles, polystyrene latex beads

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Applied Physics, Inc.

Clean Room Fogger, CRF4

Ultrapure Nitrogen Fogger, AP35

Calibration Wafer Standards

PSL Wafer Standard

Contamination Wafer Standards

Particle Wafer Standards

Cleanroom Fogger, CRF2

LN2 Nitrogen Fogger

PSL Spheres, Polystyrene Latex Beads

Silica Nanoparticles in DIH2O, 15ml or 100ml volume

Smoke Studies to Visualize Airflow and Turbulence

Call Applied Physics, Inc.

1-720-635-3931 or 303-999-6837

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Applied Physics, Inc.

Applied Physics, Inc. has provided clean room foggers from 2001, offering LN2 foggers, ultrapure foggers, a stage fogger and a portable fogger. These tools are referred to as a smoke generator or smoke machine. Cleanroom foggers are used in smoke studies of airflow turbulence in sterile rooms, ISO suites, medical operating rooms, barrier isolators and clean rooms. No cleanup is required after fogging with ultrapure and ultrasonic foggers. A Glycol Portable Fogger is available for industrial clean rooms. A  fogger performance comparison is available to compare typical fog performance of LN2 foggers and DI water foggers. You can determine which fog generator fits the needs of your smoke studies. Clean room foggers support airflow visualization as defined by USP797, ISO 14644-3, B7; Federal Standards 209E, ISO Standard 14644-1 and 14644-2. Airflow recovery testing at 100:1 recovery time is also supported with the CRF2 or CRF4 Cleanroom Fogger as defined in ISO 14644-3, B12. Applied Physics also provides calibration wafer standards, silica contamination wafer standards, polystyrene latex spheres, SiO2 nanospheres and silica nanoparticles. NIST Traceable particle depositions and Size Certificates ensure correct size response of Tencor Surfscan 6200, 6220, 6400 and 6420 wafer inspection tools; as well as KLA-Tencor Surfscan SP1, SP2, SP3, SP5 and SP5xp tools. Contact Applied Physics, Inc. at TEL: 1-303-999-6837.

CRF2 Cleanroom Fogger is a low cost fogger using Deionized or WFI water to produce 0.26 cubic meters fog / minute for 50 minutes at 57 ml fog density / minute providing 7 to 8 feet visible fog for smoke studies to visualize airflow patterns and turbulence in flow hoods, glove boxes and fume hoods. No contamination emitted, fog evaporates back to air we breathe, no clean room wipe down required.
CRF4 Cleanroom Fogger provides an adjustable fog volume using Deionized Water or WFI water to produce 1.25 cubic meters fog / minute for 45 minutes at 187 ml fog density / minute providing 10-15 feet visual fog for smoke studies in small clean rooms, ISO suites, sterile rooms, RAB, etc. Adjustable fog volume, adjustable airflow using touch pad control; or use wireless remote control for operation behind a closed wall. No contamination emitted, fog evaporates back to air we breathe, no clean room wipe down required.
AP35 Ultrapure LN2 Fogger provides a higher fog volume using LN2 and DI or WFI water to produce 5 cubic meters fog / minute for 70 minutes at 571 ml fog density / minute providing 20 - 30 feet in smoke studies to visualize airflow, patterns, direction, turbulence, dead zones and velocity in clean rooms, ISO suites, sterile rooms and medical rooms. The AP35 provides adjustable airflow using touch pad control, and wireless remote control is included for operation behind a closed wall. Adjustable fog volume is included. No contamination emitted, fog evaporates back to air we breathe, no clean room wipe down required.
AP100 Ultrapure Fogger provides the highest fog volume of any fogger in the world using LN2 and DI or WFI water to produce 15.5 cubic meters fog / minute for 90 minutes at 1520 ml fog density / minute. Four fog hose outputs are provided for 30 - 40 feet visualization of air flow patterns, turbulence and no flow air zones in smoke studies of large clean rooms, ISO suites, sterile rooms and medical rooms. It is also used to provide a pure, breatheable, stage fog. The AP100 provides adjustable airflow using touch pad control and wireless remote control is included for operation behind a closed wall. Adjustable fog volume is included. No contamination emitted, fog evaporates back to air we breathe, no clean room wipe down required.
Polystyrene Latex Spheres are NIST Traceable, certified size standards produced with polystyrene latex beads, available from 20 nanometers to 160 microns. PSL Spheres are highly accurate, size standards with a narrow particle size distribution, suspended in a DI Water solution with a trace surfactant to minimize agglomeration. Polystyrene latex beads are used to create a particle aerosol to calibrate the size accuracy of laser particle counters and produce Calibration Wafer standards.
Silica Nano-particle Size Standards are NIST Traceable, certified size standards produced with spherical silica particles at 10% concentration; available in 15ml, 100ml, 500ml and 1000ml bottles. CV is typical 3% in size range, and available from 30 nm to 2000 nm. No surfactant is used. Silica particles from 30nm to 102nm are mixed in an alcohol solution, while silica particles greater than 102nm are mixed in deionized water.
PSL Calibration Wafer Standards are certified, NIST traceable, PSL wafer standards deposited with monodisperse, polystyrene latex spheres between 40nm and 12 microns with typical counts between 2000 and 20000. Spot Deposition with multiple spot deps around the wafer have a typical particle count between 1000 and 2500 per particle size deposited. Calibration Wafers are used to calibrate the size accuracy of scanning surface inspection systems (SSIS) using low powered lasers, such as Tencor 6200, Tencor 6220, Tencor 6400 and 6420, KLA-Tencor SP1, SP2 and Hitachi wafer inspection tools.
Silica Contamination Wafer Standards are deposited with monodisperse, silica nano-particles between 40nm and 2 microns, provided with a NIST Traceable, Size Certificate. It can be deposited as a full deposition, silica wafer standard or with multiple silica particle sizes deposited around the wafer standard as a SPOT Deposition. Each silica particle has a narrow size peak or 3 % or less. Silica Contamination Wafer Standards are used to calibrate the size accuracy response of scanning surface inspection systems (SSIS) with high powered lasers, such as KLA-Tencor SP2, SP3, SP5, SP5xp and Hitachi wafer inspection tools.
CO2 Fogger, using DI Water and CO2 Ice to provide a dense fog, operating for about 8 minutes per cycle to visualize airflow for 4-6 feet in ISO suites and sterile rooms. A CO2 fogger works well during 1st 4 minutes to video smoke studies and describe airflow, patterns and turbulence in Pharmaceutical ISO suites guided by USP 797 Pharmaceutical In-Situ Airflow Analysis. No cleaning is required.

PSL Spheres, 20-900nm, Polystyrene Latex Beads, 1% concentration, 15 ml volume - Buy Now
PSL Spheres, 1um-160um, Polystyrene Latex Beads, <1% concentration, 15 ml volume - Buy Now
PSL Spheres, Surfcal 47nm to 3um, Polystyrene Latex particles, 1% or less concentration, 50 ml volume - Buy Now
Silica Nano-particles, 40nm to 2um, Silica Particles, Spheres, 10% concentration, 15 ml volume - Buy Now

VIDEO HIGHLIGHTS
  CRF4 Cleanroom Fogger video CRF2 Cleanroom Fogger video AP35 Ultrapure Fogger video  
CRF4 Cleanroom Fogger Clean Room Fogger Clean Room Ultrapure Fogger
CleanRoom Fogger, DI water fogger, LN2 Ultrapure Fogger, LN2 Fogger, Portable Fogger are all used to visualize airflow, patterns, dead zones and turbulence in smoke studies of clean rooms, sterile rooms, barrier isolators, RABS, gloveboxes and ISO suites. Guidelines for ISO 14644-3 ANNEX B7, USP 797 Insitu Airflow Analysis, Airflow Recovery and Semiconductor clean rooms are supported.

PRODUCT SUMMARIES

 

The AP35 Ultrapure Fogger produces 5 cubic meters fog per minute with 571 ml of fog density per minute to provide 20-30 feet of visual airflow. The CRF2 is the lowest cost fogger available producing 0.26 cubic meters fog per minute with 57 ml fog density to provide 7-8 feet of visible airflow in fume hoods and barrier isolators. The CRF4 is a mid range fogger providing 1.25 cubic meters of fog per minute with 187 ml of fog density to visualize airflow for 10-15 feet in small clean rooms. Cleanroom ultrapure foggers, also called LN2 foggers produce the highest volumes of ultra pure fog with adjustable fog volume, adjustable airflow and wireless remote control. Two LN2 foggers are available for your clean room requirements.

Cleanroom Fogger using DI Water or WFI Water

CRF4 Cleanroom Fogger Cleanroom foggers are smoke generators used in smoke studies to visualize airflow and turbulence with a pure fog supporting USP 797, ISO 14644 and Federal Standards guidelines in clean rooms, sterile rooms and ISO suites. The CRF4 Cleanroom Fogger provides 187 ml fog density per minute with a fog volume of 1.25 cubic meters per minute for up to 45 minutes operation providing 10-15 feet of visible airflow for smoke studies and 3D airflow modeling in clean rooms, ISO suites, medical rooms and sterile rooms. The CRF2 Cleanroom Fogger and CRF4 Cleanroom Fogger provide lower cost operation, CRF2 DI Water Fogger to visualize clean room airflow.

CRF2 and CRF4 Clean Room Fogger Information

Ultrapure LN2 Fogger using LN2 and DI or WFI Water

AP35 Ultrapure Fogger LN2 foggers are used in smoke studies, offering much higher levels of ultrapure fog in support of USP 797 guidelines, ISO 14644-3 and Federal Standards in clean rooms, sterile rooms and ISO suites. The AP35, Ultrapure Fogger provides 571 ml per minute fog density with a fog volume of up to 5 cubic meters per minute for up to 70 minutes with 20 to 30 feet of visible airflow for smoke studies and 3D airflow modeling. 3X more fog volume, 2X more fog density and 2X more aiflow travel distance, costs nearly the same as traditional LN2 foggers. The AP100 Ultrapure Fogger provides 15.5 cubic meters fog per minute at 1520 ml fog density for the largest clean rooms, sterile rooms and ISO suites. Stainless steel enclosures with electro-polish finish.

AP35 Ultrapure Fogger Information

   

Polystyrene Latex Spheres and Beads, Size Standards

PSL Spheres PSL Spheres and polystyrene latex beads are provided with 1% concentration or less in 15ml DI Water for use as particle size standards and aerosol particle challenges. A trace of surfactant is included in each bottle to reduce agglomeration. Surf-Cal, pre-mixed PSL Spheres are provided in 50ml bottles and 1E10 concentration. 1 um to 160 um PSL Spheres are available in 15ml of DI Water Solution are also provided for instrument size calibration. Larger volumes are available as special order.

20 nm to 900 nm PSL Spheres Information

PSL Calibration Wafer Standards

Calibration Wafer Standard Calibration Wafer Standards are produced on Prime Silicon Wafers, your FILM Wafers or bare masks. NIST traceable, Polystyrene Latex (PSL) Spheres are used to produce, Calibration Wafer Standards, provided from 40nm to 10um on 100mm to 300mm wafers for calibration of KLA-Tencor Surfscan SP1, SP2, SP3, SP5, SP5xp; Tencor 6200, 6400 and 6420 systems; Topcon, ADE and Hitachi wafer inspection systems. These standards are provided with a single PSL Sphere particle size deposited as FULL Wafer Deposition across the wafer or deposited with multiple Polystyrene latex sphere size peaks, deposited as spot depositions around the prime silicon wafer, film wafer, glass substrate or photo mask surface.

Calibration Wafer Standard Information

Silica Nanoparticles, Size Standards

Silica Spheres Silica Nano-particles with 10% concentration in 15ml DI Water for use as silica particle size standards and aerosol particle challenges;. Silica nanoparticles can be purchased in 15ml 100ml, 500ml and 1000ml volumes. Sizes at 102 nm or below are mixed in an alcohol solution to minimize agglomeration; while silica particles over 102nm are mixed in Deionized water. No surfactants are used. Sizes are available as calibration standards and particle challenge from 30nm to 2 microns. Functionalized silica and hydrophobic silica is available in 1Kg increments. Bulk, Dry Powder silica, commercial silicate, functionalized silica, filler in polymers, CMP slurries, nano-composites, high pressure liquid chromatography and mesoporous silica nanoparticles (MSN). Functionalized silica, hydrophobic silica, silica for polymer filler available in 1-1000 Kg increments.

Silica Nanoparticles Information

Silica, Contamination Wafer Standard, Particle Wafer Standard

Contamination Wafer Standard Contamination Wafer Standards are produced on Prime Silicon Wafers, your film wafers or blank masks. NIST traceable, Silica nanoparticles, Contamination Wafer Standards deposited with silica nano-particles are provided from 40nm to 2um on 150mm to 300mm wafers to calibrate KLA-Tencor Surfscan SP2, SP3, SP5, SP5xp; Tencor 6200, 6400 and 6420 systems; Topcon, ADE and Hitachi wafer inspection systems. These particle size standards are provided with a single silical particle size deposited as FULL Wafer Deposition across the wafer or deposited with multiple silica nanoparticle size peaks, deposited as spot depositions around the prime silicon wafer, film wafer, glass substrate or photo mask surface.

Silica Calibration Wafer Standard Information